The FEI Quanta 3D FEG is a state-of-the-art Dual Beam machine combines traditional thermal emission scanning electron microscope (SEM) with focused ion beam (FIB). This combination allows the characterization of materials in 2D and 3D (tomography), TEM sample preparation (TEM Lamella), observations at the subsurface of the specimens (cross section imaging) and structural modification of sample surfaces at the micrometer to nanometer scale. The machine features three different vacuum modes (High Vacuum, Low Vacuum & Environmental Modes), which accommodates the widest range of samples for SEM analysis, it can be either dry inorganic samples or hydrated biological samples. It also has an EBSD detector for the crystallographic orientation analysis, grain and phase analysis of material and geological samples with an optional EDS detector for semi-quantitative, point & shoot chemical analyses.

Instrument Specifications:

Electron Column:

• High resolution field emission – SEM column optimized for high-brightness & high-current
• Acceleration Voltage: 2kV to 30kV
• Probe current: 1pA to 65 pA in 15 steps
• Magnification – 30x – 1.000.000x
• SE & BSE detectors
• Low-vacuum SED (used in low vacuum mode)
• EDAX-OIM electron backscatter diffraction (EBSD) system
• EDAX energy dispersive spectroscopy (EDS) system
• Low vacuum mode
• Maximum electron beam resolution - 0.8 nm at 30kV

Focused Ion Beam Column

• High-current ion column with Ga liquid-metal ion source
• Ion source – 1kV to 30 kV
• Omniprobe nanomanipulator
• In situ Pt and C gas injection systems
• XeF2 injection needle for local etching
• Maximum ion beam resolution - 7 nm at 30kV
• Avizo Fire for 3D reconstruction in nanotomography